CHARACTERISTICS OF VARIOUS ELECTRON-BEAM SOURCES

被引：13

作者：

THOMAS, GE

GREENE, JP

MAIERKOMOR, P

LEONARD, RH

机构：

[1] TECH UNIV MUNICH,W-8046 GARCHING,GERMANY

[2] FLORIDA STATE UNIV,TALLAHASSEE,FL 32306

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1991年 / 303卷 / 01期

关键词：

D O I：

10.1016/0168-9002(91)90781-K

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Various changes have been made in two electron beam sources to make them more suitable for target preparation. The beam spot size has been made more flexible and the accessibility to some of the component parts has been improved.

引用

页码：162 / 164

页数：3