INELASTIC-SCATTERING OF MIDDLE-ENERGY ELECTRONS BY SOLID-SURFACES

被引：2

作者：

MIKHAILOV, GM

RUBTSOV, VI

ORLOV, SA

机构：

[1] Institute of Microelectronics Technology and High Purity Materials, USSR Academy of Science, 142432 Chernogolovka, Moscow District

来源：

VACUUM | 1990年 / 41卷 / 7-9期

关键词：

D O I：

10.1016/0042-207X(90)94066-Y

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Incoherent processes of multiple electron inelastic scattering by a solid surface are considered, taking into account the effects of bulk and surface excitations. The reflected electron energy loss (REEL) spectra were obtained for silicon and some 3d metals. It was shown that middle-energy electron scattering by a solid surface can be described on the basis of a bilayer model with good accuracy. The approach suggested allows determining the differential probability of electron inelastic scattering (DPEIS) both on bulk and surface excitations from the experimental REEL spectra.

引用

页码：1721 / 1724

页数：4

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