PHASE-SHIFTED QUARTER MICRON HOLOGRAPHIC GRATINGS BY SELECTIVE IMAGE REVERSAL OF PHOTORESIST

被引:5
作者
CHAN, WK
CHUNG, J
CONTOLINI, RJ
机构
来源
APPLIED OPTICS | 1988年 / 27卷 / 08期
关键词
D O I
10.1364/AO.27.001377
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:1377 / 1380
页数:4
相关论文
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