QUANTITATIVE STUDY OF THE THERMAL TRANSPIRATION EFFECT IN VACUUM GAUGES

被引：26
作者：
JITSCHIN, W
ROHL, P
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 03期
关键词：
D O I：
10.1116/1.574162
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：372 / 375
页数：4
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