SURFACE MODIFICATION OF INP BY PLASMA TECHNIQUES USING HYDROGEN AND OXYGEN

被引：18

作者：

CLARK, DT

FOK, T

机构：

来源：

THIN SOLID FILMS | 1981年 / 78卷 / 03期

关键词：

D O I：

10.1016/0040-6090(89)90593-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：271 / 278

页数：8

相关论文

共 11 条

[1] BELL AT, 1974, TECHNIQUES APPLICATI, pCH1
[2] ESCA APPLIED TO POLYMERS .23. RF GLOW-DISCHARGE MODIFICATION OF POLYMERS IN PURE OXYGEN AND HELIUM-OXYGEN MIXTURES
CLARK, DT
DILKS, A
[J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1979, 17 (04) : 957 - 976
[3] AN INVESTIGATION OF THE VACUUM UV SPECTRA OF INDUCTIVELY COUPLED RF PLASMAS EXCITED IN INERT-GASES AS A FUNCTION OF SOME OF THE OPERATING PARAMETERS
CLARK, DT
DILKS, A
[J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1980, 18 (04) : 1233 - 1246
[4] ESCA APPLIED TO POLYMERS .18. RF GLOW-DISCHARGE MODIFICATION OF POLYMERS IN HELIUM, NEON, ARGON, AND KRYPTON
CLARK, DT
DILKS, A
[J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1978, 16 (05) : 911 - 936
[5] AN INVESTIGATION BY ELECTRON-SPECTROSCOPY FOR CHEMICAL-ANALYSIS OF CHEMICAL TREATMENTS OF THE (100) SURFACE OF N-TYPE INP EPITAXIAL LAYERS FOR LANGMUIR FILM DEPOSITION
CLARK, DT
FOK, T
ROBERTS, GG
SYKES, RW
[J]. THIN SOLID FILMS, 1980, 70 (02) : 261 - 283
[6] MICROSTRUCTURE OF PLASMA-DEPOSITED A-SI-H FILMS
KNIGHTS, JC
LUJAN, RA
[J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 244 - 246
[7] ROBERTS GG, 1980, P I ELECTR ENG, V127, P137
[8] ROBERTS GG, 1978, SOLID STATE ELECTRON, V2, P169
[9] ROBERTS GI, UNPUBLISHED
[10] SHEN M, 1979, PLASMA POLYMERIZATIO