SOL-GEL DERIVED, AIR-BAKED INDIUM AND TIN OXIDE-FILMS

被引：85

作者：

MATTOX, DM

机构：

[1] University of Missouri-Rolla, Rolla, MO 65401

来源：

THIN SOLID FILMS | 1991年 / 204卷 / 01期

关键词：

D O I：

10.1016/0040-6090(91)90491-F

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A sol gel derived, transparent, electrically conducting tin-doped In2O3 film system has been developed which only requires air baking. The films approximate the properties of sputtered and hot-sprayed films but are simpler and less expensive to apply by dipping and spinning procedures. Substrate sodium interference was seen to be minimal.

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页码：25 / 32

页数：8

相关论文

共 18 条

[1] SOL-GEL DERIVED TRANSPARENT IR-REFLECTING ITO SEMICONDUCTOR COATINGS AND FUTURE APPLICATIONS [J].

ARFSTEN, NJ .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 63 (1-2) :243-249

[2]

ARFSTEN NJ, 1984, P INT C ULTRASTRUCTU

[3] EFFECTS OF ADDITIONS TO SNO2 THIN-FILMS [J].

CARROLL, AF ;

SLACK, LH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (12) :1889-1893

[4] GLASSY AND CRYSTALLINE SYSTEMS FROM GELS - CHEMICAL BASIS AND TECHNICAL APPLICATION [J].

DISLICH, H .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 57 (03) :371-388

[5] PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING [J].

FAN, JCC ;

BACHNER, FJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1719-1725

[6] HIGHLY CONDUCTIVE, TRANSPARENT FILMS OF SPUTTERED IN2-XSNXO3-Y [J].

FRASER, DB ;

COOK, HD .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (10) :1368-&

[7] MECHANISM OF CVD THIN-FILM SNO2 FORMATION [J].

GHOSHTAGORE, RN .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (01) :110-117

[8] RADIATIVE HEATING AND COOLING WITH SPECTRALLY SELECTIVE SURFACES [J].

GRANQVIST, CG .

APPLIED OPTICS, 1981, 20 (15) :2606-2615

[9]

GROTH R, 1968, Patent No. 3400288

[10] PROPERTIES OF SN-DOPED INDIUM OXIDE COATINGS DEPOSITED ON POLYESTER FILM BY HIGH-RATE REACTIVE SPUTTERING [J].

ITOYAMA, K .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) :691-694