NUCLEATION OF MISFIT DISLOCATIONS IN STRAINED-LAYER EPITAXY IN THE GEXSI1-X/SI SYSTEM

被引:89
作者
HULL, R
BEAN, JC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期
关键词
D O I
10.1116/1.575800
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:2580 / 2585
页数:6
相关论文
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