LASER ABLATION STUDIES OF MAGNESIUM-OXIDE

被引：22
作者：
DIRNBERGER, L
DYER, PE
FARRAR, S
KEY, PH
MONK, P
机构：
[1] Department of Applied Physics, University of Hull, Hull
来源：
APPLIED SURFACE SCIENCE | 1993年 / 69卷 / 1-4期
关键词：
D O I：
10.1016/0169-4332(93)90507-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The ablation of single crystal magnesium oxide using a UV-excimer KrF laser at 248 nm has been studied using a variety of diagnostic techniques. Ablation depth rate measurements indicate a threshold fluence for significant material removal of approximately 3 J cm-2 although surface damage in the form of micro-cracks is observed below this value. The effective absorption coefficient at 248 nm of 4 X 10(4) cm-1, found from the ablation rate, was much greater than observed from small signal transmission measurements. Scanning electron microscopy reveals evidence of thermal removal in the ablation regime probably mediated by a breakdown plasma, and a degree of exfoliation below the ablation threshold. The velocity of selected ablation species has been determined from time-resolved emission spectroscopy and a charge collector probe used to measure the angular distribution of ions in the ablation plume.
引用
收藏
页码：216 / 220
页数：5
相关论文
共 6 条
[1]   THIN-FILM DEPOSITION OF DIELECTRIC OXIDES BY LASER ABLATION [J].
AMIRHAGHI, S ;
ARCHER, A ;
TAGUIANG, B ;
MCMINN, R ;
BARNES, P ;
TARLING, S ;
BOYD, IW .
APPLIED SURFACE SCIENCE, 1992, 54 :205-209
[2]   ROLE OF CRACKS, PORES, AND ABSORBING INCLUSIONS ON LASER-INDUCED DAMAGE THRESHOLD AT SURFACES OF TRANSPARENT DIELECTRICS [J].
BLOEMBERGEN, N .
APPLIED OPTICS, 1973, 12 (04) :661-664
[3]   EPITAXIAL MGO ON SI(001) FOR Y-BA-CU-O THIN-FILM GROWTH BY PULSED LASER DEPOSITION [J].
FORK, DK ;
PONCE, FA ;
TRAMONTANA, JC ;
GEBALLE, TH .
APPLIED PHYSICS LETTERS, 1991, 58 (20) :2294-2296
[4]   CERAMIC LAYER EPITAXY BY PULSED LASER DEPOSITION IN AN ULTRAHIGH-VACUUM SYSTEM [J].
KOINUMA, H ;
NAGATA, H ;
TSUKAHARA, T ;
GONDA, S ;
YOSHIMOTO, M .
APPLIED PHYSICS LETTERS, 1991, 58 (18) :2027-2029
[5]  
PUELL H, 1970, Z NATURFORSCH PT A, VA 25, P1807
[6]   DEPOSITION OF OPTICAL THIN-FILMS BY PULSED LASER ASSISTED EVAPORATION [J].
SANKUR, HO ;
GUNNING, W .
APPLIED OPTICS, 1989, 28 (14) :2806-2808
1