PREPARATION AND ELECTRICAL-PROPERTIES OF STOICHIOMETRIC TIB2 THIN-FILMS

被引：19
作者：
FELDMAN, C
SATKIEWICZ, FG
JONES, G
机构：
来源：
JOURNAL OF THE LESS-COMMON METALS | 1981年 / 79卷 / 02期
关键词：
D O I：
10.1016/0022-5088(81)90071-0
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：221 / 235
页数：15
相关论文
共 24 条
[1]   MORPHOLOGY OF CHEMICAL VAPOR-DEPOSITED TITANIUM DIBORIDE [J].
BESMANN, TM ;
SPEAR, KE .
JOURNAL OF CRYSTAL GROWTH, 1975, 31 (DEC) :60-65
[2]   ANALYSIS OF CHEMICAL VAPOR-DEPOSITION OF TITANIUM DIBORIDE .1. EQUILIBRIUM THERMODYNAMIC ANALYSIS [J].
BESMANN, TM ;
SPEAR, KE .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (05) :786-790
[3]   ANALYSIS OF CHEMICAL VAPOR-DEPOSITION OF TITANIUM DIBORIDE .2. MODELING KINETICS OF DEPOSITION [J].
BESMANN, TM ;
SPEAR, KE .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (05) :790-797
[4]   STRUCTURE AND PROPERTIES OF REFRACTORY COMPOUNDS DEPOSITED BY DIRECT EVAPORATION [J].
BUNSHAH, RF ;
SCHRAMM, RJ ;
NIMMAGADDA, R ;
MOVCHAN, BA ;
BORODIN, VP .
THIN SOLID FILMS, 1977, 40 (JAN) :169-182
[5]  
Castaing J., 1977, Boron and refractory borides, P390
[6]  
CHAMBERLAIN MB, 1980, J VAC SCI TECHNOL, V15, P240
[7]  
Feldman C., 1976, Twelfth IEEE Photovoltaic Specialists Conference 1976, P100
[8]  
Feldman C., 1980, Fourteenth IEEE Photovoltaic Specialists Conference 1980, P391
[9]  
FELDMAN C, 1980, 1ST SOL EN RES I Q R
[10]  
FELDMAN C, 1980, 2ND SOL EN RES I Q R
123