CONCENTRATION-DEPENDENCE OF THE SOLID-PHASE EPITAXIAL-GROWTH RATE IN TE IMPLANTED SI

被引：12
|
作者：
CAMPISANO, SU
BARBARINO, AE
机构：
来源：
APPLIED PHYSICS | 1981年 / 25卷 / 02期
关键词：
D O I：
10.1007/BF00901288
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：153 / 155
页数：3
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