PROXIMITY CORRECTION ENHANCEMENTS FOR 1-MUM DENSE CIRCUITS

被引：14
作者：
GROBMAN, WD
SPETH, AJ
CHANG, THP
机构：
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1980年 / 24卷 / 05期
关键词：
Compendex;
D O I：
10.1147/rd.245.0537
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
LITHOGRAPHY
引用
收藏
页码：537 / 544
页数：8
相关论文
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