ELECTRON-BOMBARDMENT DAMAGE IN SILICON

被引:107
|
作者
WERTHEIM, GK
机构
来源
PHYSICAL REVIEW | 1958年 / 110卷 / 06期
关键词
D O I
10.1103/PhysRev.110.1272
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:1272 / 1279
页数:8
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