ELECTRON-BOMBARDMENT DAMAGE IN SILICON

被引：107

|

作者：

WERTHEIM, GK

机构：

来源：

PHYSICAL REVIEW | 1958年 / 110卷 / 06期

关键词：

D O I：

10.1103/PhysRev.110.1272

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：1272 / 1279

页数：8

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