UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES

被引：60

作者：

AZZAM, RMA

BASHARA, NM

机构：

来源：

关键词：

D O I：

10.1364/JOSA.61.000600

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：600 / &

共 8 条

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[3]

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[6] ELLIPSOMETRY USING A RETARDATION PLATE AS COMPENSATOR [J].

OLDHAM, WG .

[7]

Shurcliff W. A., 1962, POLARIZED LIGHT

[8] A THEORETICAL AND EXPERIMENTAL ANALYSIS OF ELLIPSOMETER [J].

SMITH, PH .