GROWTH OF THIN PLATINUM FILMS ON HYDROGENATED AMORPHOUS-SILICON AND ITS OXIDE

被引：9

作者：

GOLDSTEIN, B

SZOSTAK, DJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 03期

关键词：

D O I：

10.1116/1.570548

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：718 / 720

页数：3

共 10 条

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[5] L1L23V COSTER-KRONIG TRANSITION IN HYDROGENATED AMORPHOUS SILICON [J].

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[6] PROBING DEPTH IN PHOTOEMISSION AND AUGER-ELECTRON SPECTROSCOPY [J].

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SPICER, WE .

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[7]

POATE JM, 1978, THIN FILMS INTERDIFF, P376

[8] APPLICATION OF AUGER-ELECTRON SPECTROSCOPY TO STUDIES OF SILICON-SILICIDE INTERFACE [J].

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[9]

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[10]

WEAST RC, 1978, HDB CHEM PHYSICS

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