SURFACTANT-STABILIZED STRAINED GE CONES ON SI(001)

被引:41
作者
HORNVONHOEGEN, M
ALFALOU, A
MULLER, BH
KOHLER, U
ANDERSOHN, L
DAHLHEIMER, B
HENZLER, M
机构
[1] Institut für Festkörperphysik, Universität Hannover, 30167 Hannover
关键词
D O I
10.1103/PhysRevB.49.2637
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The formation of circular cone-shaped Ge islands (12 degrees cones) has been observed for the growth of eight monolayers of Ge on Si(001) at 700 degrees C using Sb as a surfactant. The Ge cones are strained and grow pseudomorphically, adopting the Si lattice constant. They have a tilt angle of 12 degrees and are composed of [117]-, [105]-type, and all intermediate facets. The island-size distribution is peaked around a typical size of similar to 300-400 Angstrom, which results from a formation process under equilibrium conditions for diffusion of the Ge atoms. Growth at lower temperatures down to 300 degrees C with Sb as a surfactant results in epitaxial but very rough Ge films which show a high degree of disorder.
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页码:2637 / 2650
页数:14
相关论文
共 22 条
[1]  
ALFALOU AA, UNPUB
[2]  
Burghartz J. N., 1990, International Electron Devices Meeting 1990. Technical Digest (Cat. No.90CH2865-4), P297, DOI 10.1109/IEDM.1990.237171
[3]   STABILITIES OF SINGLE-LAYER AND BILAYER STEPS ON SI(001) SURFACES [J].
CHADI, DJ .
PHYSICAL REVIEW LETTERS, 1987, 59 (15) :1691-1694
[4]   SURFACTANTS IN EPITAXIAL-GROWTH [J].
COPEL, M ;
REUTER, MC ;
KAXIRAS, E ;
TROMP, RM .
PHYSICAL REVIEW LETTERS, 1989, 63 (06) :632-635
[5]   91 GHZ SIGE HBTS GROWN BY MBE [J].
GRUHLE, A ;
KIBBEL, H ;
ERBEN, U ;
KASPER, E .
ELECTRONICS LETTERS, 1993, 29 (04) :415-417
[6]   LOW-ENERGY ELECTRON-DIFFRACTION INVESTIGATIONS OF SI MOLECULAR-BEAM EPITAXY ONTO SI(100) [J].
HORN, M ;
GOTTER, U ;
HENZLER, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (02) :727-730
[7]  
HORNVONHOEGEN M, 1993, SURF SCI, V284, P53, DOI 10.1016/0039-6028(93)90524-N
[8]   DEFECT SELF-ANNIHILATION IN SURFACTANT-MEDIATED EPITAXIAL-GROWTH [J].
HORNVONHOEGEN, M ;
LEGOUES, FK ;
COPEL, M ;
REUTER, MC ;
TROMP, RM .
PHYSICAL REVIEW LETTERS, 1991, 67 (09) :1130-1133
[9]   SURFACTANT-INDUCED REVERSIBLE CHANGES OF SURFACE-MORPHOLOGY [J].
HORNVONHOEGEN, M ;
MULLER, BH ;
ALFALOU, A ;
HENZLER, M .
PHYSICAL REVIEW LETTERS, 1993, 71 (19) :3170-3173
[10]   TRENCH FORMATION IN SURFACTANT MEDIATED EPITAXIAL FILM GROWTH OF GE ON SI(100) [J].
JUSKO, O ;
KOHLER, U ;
PIETSCH, GJ ;
MULLER, B ;
HENZLER, M .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1992, 54 (03) :265-269