CHEMICAL VAPOR PRECIPITATION OF SUBMICRON TITANIUM NITRIDE POWDER

被引：0

作者：

DEKKER, JP ^{[1
]}

VANDERPUT, PJ ^{[1
]}

NIEUWENHUIS, RR ^{[1
]}

VERINGA, HJ ^{[1
]}

SCHOONMAN, J ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL, INORGAN CHEM LAB, 2628 BL DELFT, NETHERLANDS

来源：

JOURNAL DE PHYSIQUE IV | 1991年 / 1卷 / C2期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The synthesis of submicron titanium nitride powder by Chemical Vapor Precipitation and the characteristics of primary particles are presented. The properties of the powder formed are of prime importance to the Particle Precipitation aided Chemical Vapor Deposition process. The dependence of the particle size on the synthesis parameters and the differences in powder characteristics are discussed.

引用

页码：593 / 599

页数：7