A CW CO2-LASER SUBSTRATE HEATER FOR SUPERCONDUCTING THIN-FILM DEPOSITION

被引：22

作者：

DYER, PE

ISSA, A

KEY, PH

MONK, P

机构：

[1] Dept. of Appl. Phys, Sch. of Eng.andComput

来源：

SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 1990年 / 3卷 / 09期

关键词：

D O I：

10.1088/0953-2048/3/9/009

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Single-crystal MgO and SrTiO3 substrates have been raised to temperatures suitable for deposition and in situ annealing of high-Tc superconducting thin films by the absorption of 10.6 mu m laser radiation. Steady-state temperature control in vacuum and low-pressure oxygen was achieved by varying the mark-space ratio of the RF-excited CO2 laser heater source. This approach allows high temperatures (>or=950 K) to be achieved with relatively low power input (or=30 W) and maintains deposition chamber cleanliness. © 1990 IOP Publishing Ltd.

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页码：472 / 475

页数：4

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