HIGH-CURRENT METAL-ION SOURCE FOR ION-IMPLANTATION

被引：0
|
作者：
ZHANG, HX
ZHANG, XJ
ZHOU, FS
ZHANG, SJ
HAN, Z
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：574 / 576
页数：3
相关论文
共 50 条
  • [11] EXTRACTION CHARACTERISTICS OF A HIGH-CURRENT METAL-ION SOURCE
    INOUCHI, Y
    YAMASHITA, T
    FUJIWARA, S
    MATSUDA, Y
    INAMI, H
    MATSUNAGA, K
    MATSUDA, K
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04): : 2478 - 2480
  • [12] HIGH-CURRENT PELLETRON FOR ION-IMPLANTATION
    SCHROEDER, JB
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 : 515 - 517
  • [13] HIGH-CURRENT METAL-ION PRODUCTION
    WOLF, BH
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1248 - 1252
  • [14] A BROAD-BEAM, HIGH-CURRENT METAL-ION IMPLANTATION FACILITY
    BROWN, IG
    DICKINSON, MR
    GALVIN, JE
    GODECHOT, X
    MACGILL, RA
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4): : 506 - 510
  • [15] HIGH-CURRENT METAL-ION BEAM EXTRACTION FROM A MULTICUSP ION-SOURCE
    INOUCHI, Y
    TANAKA, H
    INAMI, H
    FUKUMARU, F
    MATSUNAGA, K
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01): : 538 - 540
  • [16] PRODUCTION OF HIGH-CURRENT METAL-ION BEAMS
    HIRVONEN, JK
    CAROSELLA, CA
    HUBLER, GK
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 189 (01): : 103 - 106
  • [17] CHARGE NEUTRALIZATION DURING HIGH-CURRENT ION-IMPLANTATION
    ENGLAND, J
    ITO, H
    CURRENT, MI
    KAMATA, T
    MALONE, P
    SOLID STATE TECHNOLOGY, 1994, 37 (07) : 115 - &
  • [18] A HIGH-CURRENT MULTICHANNEL (MEQALAC) SYSTEM FOR ION-IMPLANTATION
    WEIS, T
    KLEIN, H
    SCHEMPP, A
    VANAMERSFOORT, PW
    SIEBENLIST, F
    THOMAE, RW
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 24-5 : 787 - 790
  • [19] HIGH-CURRENT ION-IMPLANTATION BY PLASMA IMMERSION TECHNIQUE
    THOMAE, RW
    SEILER, B
    BENDER, H
    BRUTSCHER, J
    GUNZEL, R
    HALDER, J
    KLEIN, H
    MULLER, J
    SARSTEDT, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 99 (1-4): : 569 - 572
  • [20] HIGH-CURRENT DENSITY, BROAD BEAM ION-IMPLANTATION
    WILBUR, PJ
    WEI, R
    SAMPATH, WS
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 116 : 215 - 220
12345