HIGH-CURRENT METAL-ION SOURCE FOR ION-IMPLANTATION

被引：0
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作者：
ZHANG, HX
ZHANG, XJ
ZHOU, FS
ZHANG, SJ
HAN, Z
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期
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中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
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页码：574 / 576
页数：3
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