MEV HE MICROBEAM ANALYSIS OF A SEMICONDUCTOR INTEGRATED-CIRCUIT

被引：0
作者：
ZHU, PR [1 ]
LIU, JR [1 ]
ZHANG, JP [1 ]
YIN, SD [1 ]
机构：
[1] CHINESE ACAD SCI,INST SEMICOND,BEIJING,PEOPLES R CHINA
来源：
VACUUM | 1989年 / 39卷 / 2-4期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：151 / 152
页数：2
相关论文
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[3]   MICROPROBES AND THEIR APPLICATION TO PIXE ANALYSIS [J].
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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 3 (1-3) :561-571
[4]   HIGH-ENERGY ION MICROPROBES [J].
NOBILING, R .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :197-202
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