SURFACE-RESISTANCE MEASUREMENT AS AN AID IN CONTROLLING FABRICATION OF SILICIDES

被引：3

作者：

MGBENU, E ^{[1
]}

PETERSSON, S ^{[1
]}

TOVE, PA ^{[1
]}

机构：

[1] UNIV UPPSALA,INST TECHNOL,UPPSALA,SWEDEN

来源：

VACUUM | 1977年 / 27卷 / 03期

关键词：

D O I：

10.1016/0042-207X(77)90058-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：209 / 211

页数：3

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[8] STUDIES OF FORMATION OF SILICIDES AND THEIR BARRIER HEIGHTS TO SILICON [J].

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