ATMOSPHERIC SCANNING ELECTRON-MICROSCOPY USING SILICON-NITRIDE THIN-FILM WINDOWS

被引：24

作者：

GREEN, ED

KINO, GS

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 03期

关键词：

D O I：

10.1116/1.585422

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report preliminary results of scanning electron microscopy (SEM) imaging with submicron resolution at atmospheric pressure using silicon nitride windows to separate the atmosphere from the electron optics. The edge response of the current system is 0.25-mu-m through 75 nm windows at 15-mu-m air path length. We discuss the merits of windowed atmospheric SEM systems.

引用

页码：1557 / 1558

页数：2

共 11 条

[1] BECK PA, 1990, UNPUB 1990 P SPRING
[2] A NOVEL THIN-FILM INTERFEROMETER
CHIM, SC
BECK, PA
KINO, GS
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (03) : 980 - 983
[3] DANILATOS GD, 1988, ADV ELECTRON EL PHYS, V71, P109
[4] DESIGN AND CONSTRUCTION OF AN ENVIRONMENTAL SEM .4.
DANILATOS, GD
[J]. SCANNING, 1990, 12 (01) : 23 - 27
[5] FUKAMI A, 1979, J ELECTRON MICROSC, V28, pS41
[6] CHARGE NEUTRALIZATION OF INSULATING SURFACES IN THE SEM BY GAS IONIZATION
MONCRIEFF, DA
ROBINSON, VNE
HARRIS, LB
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1978, 11 (17) : 2315 - 2325
[7] Pansons D.F., 1974, Advances Biol Med Physics, V15, P161
[8] SILICON AS A MECHANICAL MATERIAL
PETERSEN, KE
[J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457
[9] REIMER L, 1983, SCANNING ELECTRON MI
[10] WET STAGE MODIFICATION TO A SCANNING ELECTRON-MICROSCOPE
ROBINSON, VNE
[J]. JOURNAL OF MICROSCOPY, 1975, 103 (JAN) : 71 - 77

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