ANALYTICAL SCIENCE FOR THE DEVELOPMENT OF MICROELECTRONIC DEVICES

被引：23
|
作者：
GRASSERBAUER, M [1 ]
STINGEDER, G [1 ]
POTZL, H [1 ]
GUERRERO, E [1 ]
机构：
[1] VIENNA TECH UNIV,INST GEN ELECT ENGN & ELECTR,A-1040 VIENNA,AUSTRIA
来源：
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1986年 / 323卷 / 05期
关键词：
D O I：
10.1007/BF00470757
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：421 / 449
页数：29
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