ANALYTICAL SCIENCE FOR THE DEVELOPMENT OF MICROELECTRONIC DEVICES

被引:23
|
作者
GRASSERBAUER, M [1 ]
STINGEDER, G [1 ]
POTZL, H [1 ]
GUERRERO, E [1 ]
机构
[1] VIENNA TECH UNIV,INST GEN ELECT ENGN & ELECTR,A-1040 VIENNA,AUSTRIA
来源
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1986年 / 323卷 / 05期
关键词
D O I
10.1007/BF00470757
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:421 / 449
页数:29
相关论文
共 50 条
  • [1] ANALYTICAL APPROACHES AND EXPERT SYSTEMS IN THE CHARACTERIZATION OF MICROELECTRONIC DEVICES
    PASSOJA, DE
    CASPER, LA
    SCHARMAN, AJ
    ACS SYMPOSIUM SERIES, 1986, 295 : 1 - 17
  • [2] Informational Analytical Platform for Operating the Technological Route of Manufacturing of Microelectronic Devices
    Balizh K.S.
    Dobrodeev A.V.
    Ermakov N.V.
    Orlov I.A.
    Simakhina E.A.
    Russian Microelectronics, 2023, 52 (Suppl 1) : S163 - S167
  • [3] Technique for Iterative Refinement of Parameter Values in Analytical Models of Microelectronic Devices
    Sinyukin A.S.
    Kovalev A.V.
    Russian Microelectronics, 2023, 52 (07) : 665 - 668
  • [4] Materials development and current transport in vacuum microelectronic devices
    Rack, PD
    Li, J
    Ostdiek, P
    Peterson, JJ
    Li, L
    Rogelstad, T
    FOURTEENTH BIENNIAL UNIVERSITY/GOVERNMENT/INDUSTRY MICROELECTRONICS SYMPOSIUM, PROCEEDINGS, 2001, : 140 - 143
  • [5] VACUUM MICROELECTRONIC DEVICES
    BRODIE, I
    SCHWOEBEL, PR
    PROCEEDINGS OF THE IEEE, 1994, 82 (07) : 1006 - 1034
  • [6] Metallography of microelectronic devices
    Ahmed, WU
    PRAKTISCHE METALLOGRAPHIE-PRACTICAL METALLOGRAPHY, 2002, 39 (08): : 437 - 448
  • [7] THE DEVELOPMENT OF ANALOG MICROELECTRONIC DEVICES FOR SATELLITE-COMMUNICATIONS EQUIPMENT
    ANNENKOV, YZ
    YEVDOKIMOV, DP
    TELECOMMUNICATIONS AND RADIO ENGINEERING, 1992, 47 (11) : 44 - 45
  • [8] Development of Cost-effective Biocompatible Packaging for Microelectronic Devices
    Qian, Karen
    Malachowski, Karl
    Fiorini, Paolo
    Velenis, Dimitrios
    de Beeck, Maaike Op
    Van Hoof, Chris
    2011 ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY (EMBC), 2011, : 7674 - 7677
  • [9] Elaboration of gallium arsenide technology in Georgia for development of microelectronic devices
    Khuchua, NP
    Chakhnakia, ZD
    Khvedelidze, LV
    Melkadze, RG
    Tatunjan, AA
    Kalandadzes, GD
    Tutunjan, NA
    Diehl, R
    MICRO- AND NANOELECTRONICS 2003, 2004, 5401 : 344 - 353
  • [10] Development of an ultraslim permanent magnet brushless motor for microelectronic devices
    Hsu, Liang-Yi
    Huang, Chien-Chin
    Yan, Guo-Jhih
    Tsai, Mi-Ching
    JOURNAL OF APPLIED PHYSICS, 2008, 103 (07)