TRAVELING WAVE-DRIVEN MICROFABRICATED ELECTROHYDRODYNAMIC PUMPS FOR LIQUIDS

被引：106
作者：
FUHR, G [1 ]
SCHNELLE, T [1 ]
WAGNER, B [1 ]
机构：
[1] FRAUNHOFER INST SILIZIUMTECHNOL,D-14199 BERLIN,GERMANY
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1994年 / 4卷 / 04期
关键词：
D O I：
10.1088/0960-1317/4/4/007
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The basic principles of high-frequency travelling wave-driven micropumps are explained. We describe the design and construction of closed pump systems which contain planar and three dimensional components fabricated by semiconductor technology. Theoretical and experimental results and further perspectives are discussed.
引用
收藏
页码：217 / 226
页数：10
相关论文
共 19 条
[1]   MICROFABRICATED ELECTROHYDRODYNAMIC PUMPS [J].
BART, SF ;
TAVROW, LS ;
MEHREGANY, M ;
LANG, JH .
SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :193-197
[2]   EFFICIENCY OF ELECTROHYDRODYNAMIC PUMPS IN THE ATTRACTION MODE [J].
CROWLEY, JM .
JOURNAL OF ELECTROSTATICS, 1980, 8 (2-3) :171-181
[3]  
DUHLER VR, 1992, IEEE SOLID STATE SEN, P10
[4]   BIPOLAR MODEL FOR TRAVELING-WAVE INDUCED NON-EQUILIBRIUM DOUBLE-LAYER STREAMING IN INSULATING LIQUIDS [J].
EHRLICH, RM ;
MELCHER, JR .
PHYSICS OF FLUIDS, 1982, 25 (10) :1785-1793
[5]  
Fuhr G., 1992, Journal of Microelectromechanical Systems, V1, P141, DOI 10.1109/84.186393
[6]   DESIGN OF ASYNCHRONOUS DIELECTRIC MICROMOTORS [J].
HAGEDORN, R ;
FUHR, G ;
MULLER, T ;
SCHNELLE, T ;
SCHNAKENBERG, U ;
WAGNER, B .
JOURNAL OF ELECTROSTATICS, 1994, 33 (02) :159-185
[7]   TRAVELING-WAVE DIELECTROPHORESIS OF MICROPARTICLES [J].
HAGEDORN, R ;
FUHR, G ;
MULLER, T ;
GIMSA, J .
ELECTROPHORESIS, 1992, 13 (1-2) :49-54
[8]   CAPILLARY ELECTROPHORESIS AND SAMPLE INJECTION SYSTEMS INTEGRATED ON A PLANAR GLASS CHIP [J].
HARRISON, DJ ;
MANZ, A ;
FAN, ZH ;
LUDI, H ;
WIDMER, HM .
ANALYTICAL CHEMISTRY, 1992, 64 (17) :1926-1932
[9]   ELECTROCONVECTIVE INSTABILITY IN A FLUID LAYER [J].
JOLLY, DC ;
MELCHER, JR .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1970, 314 (1517) :269-&
[10]   A THEORETICAL-STUDY OF THE THERMAL ELECTROHYDRODYNAMIC INDUCTION PUMP WITH HARMONICS AND INHOMOGENEOUS FLUIDS [J].
KREIN, PT .
PHYSICS OF FLUIDS, 1984, 27 (02) :315-318
12