REACTIVE MAGNETRON DEPOSITION OF TRANSPARENT CONDUCTIVE FILMS

被引：58
|
作者：
SMITH, JF
ARONSON, AJ
CHEN, D
CLASS, WH
机构：
来源：
THIN SOLID FILMS | 1980年 / 72卷 / 03期
关键词：
D O I：
10.1016/0040-6090(80)90533-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：469 / 474
页数：6
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