LASER DIRECT-WRITE METALLIZATION IN THIN PALLADIUM ACETATE FILMS

被引：87
作者：
GROSS, ME
APPELBAUM, A
GALLAGHER, PK
机构：
[1] AT and T Bell Laboratories, Murray Hill
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 04期
关键词：
D O I：
10.1063/1.338049
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Micron-scale palladium lines have been produced by a photothermal laser direct-write process in thin palladium acetate films. The range of observed structures relates to the complex thermal profiles generated by coupling of the incident laser radiation with the exothermic heat of reaction. Surprisingly, the chemical composition of these features does not vary significantly as a function of laser power and scan speed. Rather, deviation of the electrical resistivities of these features from that of pure palladium results from porosity in the lines.
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页码：1628 / 1632
页数：5
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