PULSED ELECTRON-BEAMS FOR ANNEALING OF ION-IMPLANTED SILICON

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作者：

LITTLE, RG

GREENWALD, AG

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BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1978年 / 23卷 / 08期

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O4 [物理学];

学科分类号：

0702 ;

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页码：1031 / 1032

页数：2

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