NUMERICAL-SIMULATION OF CRYSTAL-GROWTH - INFLUENCE OF MELT CONVECTION ON GLOBAL HEAT-TRANSFER AND INTERFACE SHAPE

被引:22
作者
RYCKMANS, Y
NICODEME, P
DUPRET, F
机构
[1] Unité de Mécanique Appliquée, Université Catholique de Louvain, Louvain-la-Neuve, B-1348
关键词
D O I
10.1016/S0022-0248(08)80010-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The numerical simulation of heat transfer in a Czochralski puller is considered. Particular attention is paid to the influence of melt convection on the shape of the melt-crystal interface and the thermal gradients within the melt and the crystal. Examples of germanium and gallium arsenide growth are analyzed. © 1990, Elsevier Science Publishers B.V.. All rights reserved.
引用
收藏
页码:702 / 706
页数:5
相关论文
共 12 条
[1]   RADIATIVE HEAT-EXCHANGE IN CZOCHRALSKI CRYSTAL-GROWTH [J].
ATHERTON, LJ ;
DERBY, JJ ;
BROWN, RA .
JOURNAL OF CRYSTAL GROWTH, 1987, 84 (01) :57-78
[2]   FINITE-ELEMENT SIMULATION OF CZOCHRALSKI BULK FLOW [J].
CROCHET, MJ ;
WOUTERS, PJ ;
GEYLING, FT ;
JORDAN, AS .
JOURNAL OF CRYSTAL GROWTH, 1983, 65 (1-3) :153-165
[3]   THERMAL-CAPILLARY ANALYSIS OF CZOCHRALSKI AND LIQUID ENCAPSULATED CZOCHRALSKI CRYSTAL-GROWTH .1. SIMULATION [J].
DERBY, JJ ;
BROWN, RA .
JOURNAL OF CRYSTAL GROWTH, 1986, 74 (03) :605-624
[4]   THERMAL-CAPILLARY ANALYSIS OF CZOCHRALSKI AND LIQUID ENCAPSULATED CZOCHRALSKI CRYSTAL-GROWTH .2. PROCESSING STRATEGIES [J].
DERBY, JJ ;
BROWN, RA .
JOURNAL OF CRYSTAL GROWTH, 1986, 75 (02) :227-240
[5]  
Dupret F., 1986, Sixth International Symposium on Finite Element Methods in Flow Problems, P267
[6]   NUMERICAL-METHOD FOR REDUCING STRESS LEVEL IN GAAS CRYSTALS [J].
DUPRET, F ;
NICODEME, P ;
RYCKMANS, Y .
JOURNAL OF CRYSTAL GROWTH, 1989, 97 (01) :162-172
[7]   NUMERICAL-CALCULATION OF THE GLOBAL HEAT-TRANSFER IN A CZOCHRALSKI FURNACE [J].
DUPRET, F ;
RYCKMANS, Y ;
WOUTERS, P ;
CROCHET, MJ .
JOURNAL OF CRYSTAL GROWTH, 1986, 79 (1-3) :84-91
[8]  
Kobayashi N., 1981, PREPARATION PROPERTI, V6
[9]  
LANGLOIS WE, 1985, ANNU REV FLUID MECH, V17, P191
[10]  
NICODEME P, 1988, 5TH P INT C SEM 3 5, P471