CRYSTALLIZATION OF SILICON-NITRIDE BY RAPID CONDENSATION OF HIGH-TEMPERATURE ULTRASUPERSATURATED GAS

被引:2
作者
YAMADA, K [1 ]
SATO, J [1 ]
TOBISAWA, S [1 ]
SAWAOKA, AB [1 ]
机构
[1] TOKYO INST TECHNOL,ENGN MAT RES LAB,YOKOHAMA,KANAGAWA 227,JAPAN
关键词
D O I
10.1007/BF01131226
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
[No abstract available]
引用
收藏
页码:285 / 287
页数:3
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