PALLADIUM SILICIDE OHMIC CONTACTS TO SHALLOW JUNCTIONS IN SILICON

被引：5
|
作者：
SINGH, RN
SKELLY, DW
BROWN, DM
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 11期
关键词：
D O I：
10.1149/1.2108414
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：2390 / 2393
页数：4
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