SILICON AS A MECHANICAL MATERIAL

被引：2054
作者：
PETERSEN, KE [1 ]
机构：
[1] IBM CORP, RES LAB, SAN JOSE, CA 95193 USA
来源：
PROCEEDINGS OF THE IEEE | 1982年 / 70卷 / 05期
关键词：
D O I：
10.1109/PROC.1982.12331
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：420 / 457
页数：38
相关论文
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