TITANIUM AND NIOBIUM IMPLANTATION INTO ALPHA-AL2O3 - STRUCTURAL AND MECHANICAL-PROPERTIES

被引：3

作者：

BAUER, M ^{[1
]}

RAMOS, SMM ^{[1
]}

CANUT, B ^{[1
]}

LOUBET, JL ^{[1
]}

ROMANA, L ^{[1
]}

GEA, L ^{[1
]}

KAPSA, P ^{[1
]}

THEVENARD, P ^{[1
]}

机构：

[1] UNIV LYON 1, DEPT PHYS MAT, CNRS, URA 172, F-69622 VILLEURBANNE, FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 65卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(92)95055-V

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A comparison of the structural and surface mechanical properties of alpha-Al2O3 implanted with titanium and niobium ions were carried out. For this purpose, single crystal samples were implanted with Ti+ and Nb+ ions at 150 keV with fluences ranging from 10(16) to 10(17) ions cm-2. For fluences above 10(16) ions cm-2, the substitutional fraction of titanium is two times that of niobium. For high fluences (10(17) ions cm-2) the formation of an amorphous layer is evidenced. The different chemical states of atoms in the implanted layers were determined by X-ray photoelectron spectroscopy (XPS). Nanoindentation experiments showed that low fluence implantations of titanium and niobium resulted in the increase of elastic modulus. For high fluences the amorphous transformation softens the implanted material and significant decreases of the hardness and Young's modulus were observed.

引用

页码：301 / 304

页数：4

共 19 条

[1] SURFACE SOFTENING IN SILICON BY ION-IMPLANTATION [J].

BURNETT, PJ ;

PAGE, TF .

JOURNAL OF MATERIALS SCIENCE, 1984, 19 (03) :845-860

[2]

BURNETT PJ, 1984, PLASTIC DEFORMATION, P669

[3] LATTICE DISORDER IN ALPHA-AL2O3 INDUCED BY NIOBIUM IMPLANTATION [J].

CANUT, B ;

ROMANA, L ;

THEVENARD, P ;

MONCOFFRE, N .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4) :128-132

[4]

CHIANG SS, 1981, THESIS LAWRENCE BERK

[5] MECHANICAL PROPERTY CHANGES IN SAPPHIRE BY NICKEL ION-IMPLANTATION AND THEIR DEPENDENCE ON IMPLANTATION TEMPERATURE [J].

HIOKI, T ;

ITOH, A ;

OHKUBO, M ;

NODA, S ;

DOI, H ;

KAWAMOTO, J ;

KAMIGAITO, O .

JOURNAL OF MATERIALS SCIENCE, 1986, 21 (04) :1321-1328

[6] EFFECT OF ION-IMPLANTATION ON FRACTURE-STRESS OF AL2O3 [J].

HIOKI, T ;

ITOH, A ;

NODA, S ;

DOI, H ;

KAWAMOTO, J ;

KAMIGAITO, O .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :521-525

[7] CORRELATION OF INDENTATION EXPERIMENTS [J].

JOHNSON, KL .

JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 1970, 18 (02) :115-&

[8]

LOUBET JL, IN PRESS J AM SOC

[9] THE AMORPHIZATION OF CERAMICS BY ION-BEAMS [J].

MCHARGUE, CJ ;

FARLOW, GC ;

WHITE, CW ;

WILLIAMS, JM ;

APPLETON, BR ;

NARAMOTO, H .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :123-127

[10] THE RESIDUAL CHARGE STATE OF TIN IMPLANTED INTO SAPPHIRE [J].

MCHARGUE, CJ ;

SKLAD, PS ;

MCCALLUM, JC ;

WHITE, CW ;

PEREZ, A ;

ABONNEAU, E ;

MAREST, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4) :74-78

← 1 2 →