HOLOGRAPHICALLY PRODUCED TRANSMISSION DIFFRACTION GRATINGS FOR SOFT X-RAYS

被引:14
作者
ARAKAWA, ET
CALDWELL, PJ
机构
来源
NUCLEAR INSTRUMENTS & METHODS | 1980年 / 172卷 / 1-2期
关键词
D O I
10.1016/0029-554X(80)90649-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:293 / 296
页数:4
相关论文
共 3 条
[1]   PROPERTIES AND PROSPECTS OF HOLOGRAPHIC TRANSMISSION GRATINGS [J].
KALLNE, E ;
SCHNOPPER, HW ;
DELVAILLE, JP ;
VANSPEYBROECK, LP ;
BACHRACH, RZ .
NUCLEAR INSTRUMENTS & METHODS, 1978, 152 (01) :103-107
[2]   SPECTRAL SENSITIVITY AND LINEARITY OF SHIPLEY AZ-1350J PHOTORESIST [J].
NORMAN, SL ;
SINGH, MP .
APPLIED OPTICS, 1975, 14 (04) :818-820
[3]   DIFFRACTION GRATING TRANSMISSION EFFICIENCIES FOR XUV AND SOFT X-RAYS [J].
SCHNOPPER, HW ;
VANSPEYBROECK, LP ;
DELVAILLE, JP ;
EPSTEIN, A ;
KALLNE, E ;
BACHRACH, RZ ;
DIJKSTRA, J ;
LANTWARD, L .
APPLIED OPTICS, 1977, 16 (04) :1088-1091