SIMPLE, RAPID SPUTTERING APPARATUS

被引：33

作者：

BELSER, RB

HICKLIN, WH

机构：

来源：

关键词：

D O I：

10.1063/1.1715547

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：293 / 296

页数：4

共 19 条

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WEHNER, GK .

[17]

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[18]

Wright AW., 1877, AM J SCI, Vs3-14, P169, DOI [10.2475/ajs.s3-14.81.169, DOI 10.2475/AJS.S3-14.81.169]

[19]

STANDARD FITTINGS DO