SIMPLE, RAPID SPUTTERING APPARATUS

被引：33

作者：

BELSER, RB

HICKLIN, WH

机构：

来源：

关键词：

D O I：

10.1063/1.1715547

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：293 / 296

页数：4

共 19 条

[1]

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[2]

BARTLETT RS, 1928, PHIL MAG, V5, P858

[3]

BELSER RB, 1953, PHYS REV, V92, P1098

[4]

BELSER RB, 1954, PHYS REV, V95, P307

[5] A TECHNIQUE OF SOLDERING TO THIN METAL FILMS [J].

BELSER, RB .

[6]

Crookes W., 1891, P R SOC LONDON, V50, P88

[7]

GROVE WR, 1952, T ROY SOC LONDON, V1, P87

[8] The preparation of sputtered metal films [J].

Hulburt, EO .

[9]

MASSEY HSW, 1952, ELECTRON IONIC IMP, P578

[10] On the electrical properties of thin metal films [J].

Patterson, J. .