SURFACE-MORPHOLOGY AND CRYSTAL-STRUCTURES OF AS-GROWN BISRCACUO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FROM 3 TARGETS

被引：32
|
作者：
KURODA, K [1 ]
KOJIMA, K [1 ]
TANIOKU, M [1 ]
YOKOYAMA, K [1 ]
HAMANAKA, K [1 ]
机构：
[1] MITSUBISHI ELECTR CO,MAT RES LAB,AMAGASAKI,HYOGO 661,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 09期
关键词：
D O I：
10.1143/JJAP.28.1586
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1586 / 1592
页数：7
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