ANALYSIS OF ELASTIC AND PLASTIC-DEFORMATION ASSOCIATED WITH INDENTATION TESTING OF THIN-FILMS ON SUBSTRATES

被引:442
作者
BHATTACHARYA, AK [1 ]
NIX, WD [1 ]
机构
[1] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305
关键词
D O I
10.1016/0020-7683(88)90091-1
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
引用
收藏
页码:1287 / 1298
页数:12
相关论文
共 7 条
[1]   FINITE-ELEMENT SIMULATION OF INDENTATION EXPERIMENTS [J].
BHATTACHARYA, AK ;
NIX, WD .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 1988, 24 (09) :881-891
[2]   A method for interpreting the data from depth-sensing indentation instruments [J].
Doerner, M. F. ;
Nix, W. D. .
JOURNAL OF MATERIALS RESEARCH, 1986, 1 (04) :601-609
[3]   Plastic properties of thin films on substrates as measured by submicron indentation hardness and substrate curvature techniques [J].
Doerner, M. F. ;
Gardner, D. S. ;
Nix, W. D. .
JOURNAL OF MATERIALS RESEARCH, 1986, 1 (06) :845-851
[4]   CORRELATION OF INDENTATION EXPERIMENTS [J].
JOHNSON, KL .
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 1970, 18 (02) :115-&
[6]   HARDNESS MEASUREMENT AT PENETRATION DEPTHS AS SMALL AS 20-NM [J].
PETHICA, JB ;
HUTCHINGS, R ;
OLIVER, WC .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1983, 48 (04) :593-606
[7]  
1985, ABAQUS FINITE ELEMEN