ETCHING SILICON SURFACES WITH HYDROGEN-ATOMS

被引：7
作者：
LU, F
CORBETT, JW
SNYDER, C
机构：
[1] SUNY ALBANY,DEPT PHYS,ALBANY,NY 12222
[2] SUNY ALBANY,DEPT CHEM,ALBANY,NY 12222
来源：
PHYSICS LETTERS A | 1988年 / 133卷 / 4-5期
关键词：
D O I：
10.1016/0375-9601(88)91026-2
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：249 / 252
页数：4
相关论文
共 16 条
[1]   GROUND-STATES OF MOLECULES .25. MINDO-3 - IMPROVED VERSION OF MINDO SEMIEMPIRICAL SCF-MO METHOD [J].
BINGHAM, RC ;
DEWAR, MJS ;
LO, DH .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1975, 97 (06) :1285-1293
[2]  
BONAPASTA AA, IN PRESS
[3]  
CORBETT JW, 1986, AMORPHOUS HYDRIDES, P243
[4]  
CORBETT JW, 1988, IN PRESS DEFECTS ELE
[5]   EVALUATION OF SEMIEMPIRICAL QUANTUM-CHEMICAL METHODS IN SOLID-STATE APPLICATIONS .1. MOLECULAR-CLUSTER CALCULATIONS OF DEFECTS IN SILICON [J].
DEAK, P ;
SNYDER, LC ;
SINGH, RK ;
CORBETT, JW .
PHYSICAL REVIEW B, 1987, 36 (18) :9612-9618
[6]   EVALUATION OF SEMIEMPIRICAL QUANTUM-CHEMICAL METHODS IN SOLID-STATE APPLICATIONS .2. CYCLIC-CLUSTER CALCULATIONS OF SILICON [J].
DEAK, P ;
SNYDER, LC .
PHYSICAL REVIEW B, 1987, 36 (18) :9619-9627
[7]   STATE AND MOTION OF HYDROGEN IN CRYSTALLINE SILICON [J].
DEAK, P ;
SNYDER, LC ;
CORBETT, JW .
PHYSICAL REVIEW B, 1988, 37 (12) :6887-6892
[8]   THE SELF-TRAPPING OF HYDROGEN IN SEMICONDUCTORS [J].
DEAK, P ;
SNYDER, LC ;
LINDSTROM, JL ;
CORBETT, JW ;
PEARTON, SJ ;
TAVENDALE, AJ .
PHYSICS LETTERS A, 1988, 126 (07) :427-430
[9]  
FENG SJ, 1987, APPL PHYS LETT, V50, P1912
[10]  
GATES SM, IN PRESS SURF SCI
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