THERMAL-ANALYSIS OF THIN-FILM MICROMACHINING WITH LASERS

被引：46

作者：

PAEK, UC ^{[1
]}

KESTENBAUM, A ^{[1
]}

机构：

[1] WESTERN ELECT CO INC, ENGN RES CTR, PRINCETON, NJ 08540 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 05期

关键词：

D O I：

10.1063/1.1662547

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2260 / 2268

页数：9

共 11 条

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[4]

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[8] MICROMACHINING AND IMAGE RECORDING ON THIN FILMS BY LASER BEAMS [J].

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[9] MAGNETIC HOLOGRAPHY [J].

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[10] STRUCTURAL INVESTIGATION OF LASER MACHINING OF THIN BISMUTH FILMS [J].

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