FABRICATION OF DIAMOND MEMBRANES FOR X-RAY MASKS BY HOT-FILAMENT METHOD

被引：11

作者：

MARUMOTO, K ^{[1
]}

YABE, H ^{[1
]}

MATSUI, Y ^{[1
]}

YAMASHITA, H ^{[1
]}

KIKUCHI, N ^{[1
]}

机构：

[1] MITSUBISHI MAT CORP,CENT RES INST,OMIYA,SAITAMA 330,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 12B期

关键词：

DIAMOND FILMS; CHEMICAL VAPOR DEPOSITION (CVD); X-RAY MASK; MASK MEMBRANE; HOT-FILAMENT METHOD; STRESS; OPTICAL TRANSMITTANCE;

D O I：

10.1143/JJAP.31.4205

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Diamond thin films have been grown on a Si substrate by a hot-filament method with mixtures of CH4 and H-2, and properties such as stress and optical transmittance were investigated for free-standing membrane films as a function of methane concentration (0.5-2.0%) and deposition pressure (8-80 Torr). Ellipsometric and Raman scattering measurements were also carried out to evaluate the film structure, and graphite and void components. It has been found that the loss in the optical transparency is mainly due to light scattering at the surface. It is also shown that boron doping is useful for decreasing the film resistivity, which is advantageous for electron beam (EB) writing and inspections.

引用

页码：4205 / 4209

页数：5

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