SPUTTERED FE2O3 FILMS FOR USE IN SEE THROUGH MASKS

被引：12

作者：

PETERS, FG

SINCLAIR, WR

SULLIVAN, MV

机构：

来源：

关键词：

D O I：

10.1149/1.2404191

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：305 / &

共 16 条

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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (05) : 776 - +
[9] MELLOR JW, 1935, COMPREHENSIVE TREATI, V14, P370
[10] STRUCTURAL EVALUATION OF SILICON OXIDE FILMS
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