SUPERPOLISHING SAPPHIRE - A METHOD TO PRODUCE ATOMICALLY FLAT AND DAMAGE FREE SURFACES

被引：19
|
作者：
HADER, B
WEIS, O
机构：
来源：
SURFACE SCIENCE | 1989年 / 220卷 / 01期
关键词：
D O I：
10.1016/0039-6028(89)90466-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：118 / 130
页数：13
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