SUPERPOLISHING SAPPHIRE - A METHOD TO PRODUCE ATOMICALLY FLAT AND DAMAGE FREE SURFACES

被引:19
|
作者
HADER, B
WEIS, O
机构
关键词
D O I
10.1016/0039-6028(89)90466-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
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页码:118 / 130
页数:13
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