EPITAXIAL DEPOSITION OF SILICON ON QUARTZ

被引：38

|

作者：

BICKNELL, RW

STIRLAND, DJ

CHARIG, JM

JOYCE, BA

机构：

来源：

PHILOSOPHICAL MAGAZINE | 1964年 / 9卷 / 102期

关键词：

D O I：

10.1080/14786436408211908

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：965 / &

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