EPITAXIAL DEPOSITION OF SILICON ON QUARTZ

被引：38
|
作者：
BICKNELL, RW
STIRLAND, DJ
CHARIG, JM
JOYCE, BA
机构：
来源：
PHILOSOPHICAL MAGAZINE | 1964年 / 9卷 / 102期
关键词：
D O I：
10.1080/14786436408211908
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：965 / &
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