APPLICATIONS OF HIGH-SPEED DATA ACQUISITION FOR BIPOLAR DEVICE-YIELD ANALYSIS

被引：2
作者：
CHARLES, JM
LANTZ, MW
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1980年 / 27卷 / 12期
关键词：
D O I：
10.1109/T-ED.1980.20269
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：2299 / 2303
页数：5
相关论文
共 8 条
[1]   BRIDGE AND VAN-DER-PAUW SHEET RESISTORS FOR CHARACTERIZING LINE-WIDTH OF CONDUCTING LAYERS [J].
BUEHLER, MG ;
GRANT, SD ;
THURBER, WR .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (04) :650-654
[2]  
DILLINGHAM L, COMMUNICATION
[3]  
PERLOFF DS, 1977, SOLID STATE TECHNOL, V20, P31
[4]   4-POINT SHEET RESISTANCE MEASUREMENTS OF SEMICONDUCTOR DOPING UNIFORMITY [J].
PERLOFF, DS ;
WAHL, FE ;
CONRAGAN, J .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (04) :582-590
[5]  
PERLOFF DS, 1980, SOLID STATE TECHNOL, V23, P81
[6]   VAN-DER-PAUW RESISTOR STRUCTURE FOR DETERMINING MASK SUPERPOSITION ERRORS ON SEMICONDUCTOR SLICES [J].
PERLOFF, DS .
SOLID-STATE ELECTRONICS, 1978, 21 (08) :1013-1018
[7]  
RUSSELL TJ, 1979, SOLID STATE TECHNOL, V22, P71
[8]  
Wolfe G., 1976, Circuits Manufacturing, V16
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