H-1 NUCLEAR-MAGNETIC-RESONANCE STUDY OF HYDROGEN DISTRIBUTION IN PARTIALLY DEUTERATED HYDROGENATED AMORPHOUS-SILICON

被引：3

作者：

HAYASHI, S ^{[1
]}

HAYAMIZU, K ^{[1
]}

MASHIMA, S ^{[1
]}

SUZUKI, A ^{[1
]}

MCELHENY, PJ ^{[1
]}

YAMASAKI, S ^{[1
]}

MATSUDA, A ^{[1
]}

机构：

[1] ELECTROTECH LAB,TSUKUBA,IBARAKI 305,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1991年 / 30卷 / 4A期

关键词：

NUCLEAR MAGNETIC RESONANCE; NMR; H-1; HYDROGENATED AMORPHOUS SILICON; DEUTERIUM; HYDROGEN DISTRIBUTION;

D O I：

10.1143/JJAP.30.L541

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Hydrogen distribution in partially deuterated hydrogenated amorphous silicon has been studied by means of H-1 nuclear magnetic resonance. It has been demonstrated that the incorporation of D atoms changes the H distribution in the film.

引用

页码：L541 / L543

页数：3

共 8 条

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