ND-YAG LASER ANNEALING OF SILICON ON SAPPHIRE

被引：0
|
作者：
AFFOLTER, K
LUTHY, W
ROULET, ME
SCHWOB, P
FALLAVIER, M
THOMAS, JP
MACKOWSKI, JM
机构：
[1] INST APPL PHYS,CH-3012 BERN,SWITZERLAND
[2] CTR ELECTR HORLOGER,CH-2000 NEUCHATEL,SWITZERLAND
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1979年 / 126卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C364 / C364
页数：1
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